It was an interesting day when I first heard about MKS’s plans to release a new wide range cold cathode gauge. I though to myself, “does the world need another 10-2 torr Cold Cathode Ionization Gauge?” Well, if that is what you are asking yourself, too then take a closer look. This transducer provides a wide measurement range of 10-7 torr to Atmosphere, eliminating the need for multiple gauges.
The Series 523 uses two different types of discharges. The first is the normal pressure dependent discharge found in every CCIG which covers the range from 1 × 10-7 to 1 × 10-2 torr. The second range between 1 × 10-2 torr up to 10 torr is derived from a glow discharge measurements cause by the breakdown of the gas by the electric field. Above 10 torr, the pressure is measured by the arc discharge current. The published accuracy of the gauge is +/-50% over the range of the gauge.
The cost is contained by the elimination of expensive ceramic-to-metal seals. The 304 SST electrode structures inside the gauge are unique and made possible by using injection molding technology to build the sensor. The electrodes are held in place by the polymer that forms the vacuum envelope and the electrical feed through materials. The polymer, Polypropylene, was selected for low outgassing rate, mechanical and temperature stability and electrical properties.
The target market for this gauge is that set of processes that do not heavily rely on accuracy but just need basic vacuum level information. For applications that require higher degrees of accuracy, MKS provides a vast selection of vacuum measuring solutions.
Understanding Modern Vacuum Technology describes Cold Cathode Ionization Gauge technology as well as all the other pressure technology used in science and industry today. UMVT is available through Amazon.com.
You can read about the MKS 523 wide range CCIG on the MKS website.